High-Speed Interconnect &
Advanced Packaging
High-Speed Interconnect & Advanced Packaging
High-Precision Lens Manufacturing Technology
Integration of atmospheric energy beam and ion beam non-contact precision figuring technologies, providing high-precision, low-damage processing with optical surface figure accuracy up to λ/50.
The team has developed two key advanced non-conventional optical figuring technologies—Atmospheric Micro-Plasma Beam Figuring and Ion Beam Figuring—for the ultra-precision surface figuring of spherical, aspherical, and freeform optical components. These technologies overcome the limitations of conventional grinding and polishing in achieving ultra-high surface figure accuracy and low-stress material removal, enabling deterministic nanometer-scale surface figure correction while minimizing subsurface damage.
Leveraging these non-contact nanometer-scale figuring processes, the team has successfully fabricated high-precision optical calibration components, including a plane reference mirror and a rectangular reference mirror, with surface figure accuracies of λ/50 and λ/10, respectively. These ultra-precision optical references provide critical calibration standards for advanced semiconductor optical systems, ultra-precision optical manufacturing, and high-end metrology equipment.
